Si cap passivation for Ge nMOS applications

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Authors
Sioncke, Sonja; Vanherle, Wendy; Art, Wim; Ceuppens, Joris; Ivanov, Tsvetan; Lin, Dennis; Nyns, Laura; Delabie, Annelies; Conard, Thierry; Struyf, Herbert; De Gendt, Stefan; Caymax, Matty; Collaert, Nadine; Thean, Aaron
ISSN
0167-9317
Journal
Microelectronic Engineering
Volume
109
Title
Si cap passivation for Ge nMOS applications
Publication type
Journal article
Embargo date
9999-12-31
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