dc.contributor.author | Tamaddon, Amir-Hossein | |
dc.contributor.author | Mertens, Paul | |
dc.contributor.author | Vereecke, Guy | |
dc.contributor.author | Holsteyns, Frank | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Heyns, Marc | |
dc.date.accessioned | 2021-10-21T12:34:50Z | |
dc.date.available | 2021-10-21T12:34:50Z | |
dc.date.issued | 2013 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/23150 | |
dc.source | IIOimport | |
dc.title | Watermark formation mechanism by evaporation of ultra-pure water: Study the effect of ambient | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Tamaddon, Amir-Hossein | |
dc.contributor.imecauthor | Mertens, Paul | |
dc.contributor.imecauthor | Vereecke, Guy | |
dc.contributor.imecauthor | Holsteyns, Frank | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.contributor.orcidimec | Tamaddon, Amir-Hossein::0000-0003-4566-0697 | |
dc.contributor.orcidimec | Vereecke, Guy::0000-0001-9058-9338 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 2116 | |
dc.source.conference | 224th Electrochemical society meeting, 13th International Symposium on Semiconductor Cleaning Science and Technology (SCST13) | |
dc.source.conferencedate | 27/10/2013 | |
dc.source.conferencelocation | San Francisco, CA USA | |
dc.identifier.url | http://ma.ecsdl.org/content/MA2013-02/30/2116.abstract | |
imec.availability | Published - open access | |
imec.internalnotes | ECS Meeting Abstracts; Vol. MA2013-02 | |