Authors

Tang, Baojun; Toledano Luque, Maria; Zhang, W.D.; Van den Bosch, Geert; Degraeve, Robin; Zhang, J.F.; Van Houdt, Jan

ISSN

0167-9317

Journal

Microelectronic Engineering

Volume

109

Title

Statistical characterization of vertical poly-Si channel using charge pumping technique for 3D flash memory optimization

Publication type

Journal article