Publication:

Heated implantation with amorphous carbon CMOS mask for scaled FinFETs

Date

2013

Proceedings Paper

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Files

27834.pdf 2.19 MB

Author(s)

Togo, Mitsuhiro

;

Sasaki, Yuichiro

;

Zschaetzsch, Gerd

;

Boccardi, Guillaume

;

Ritzenthaler, Romain

;

;

;

Colombeau, Benjamin

;

;

Martin, Patrick

;

;

Altamirano Sanchez, Efrain

;

Mannaert, Geert

;

Dekkers, Harold

;

Hellings, Geert

;

Horiguchi, Naoto

;

Vandervorst, Wilfried

;

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