Heated implantation with amorphous carbon CMOS mask for scaled FinFETs

Thumbnail
View/open
Metadata
Show full item record
Authors
Togo, Mitsuhiro; Sasaki, Yuichiro; Zschaetzsch, Gerd; Boccardi, Guillaume; Ritzenthaler, Romain; Lee, Jae Woo; Khaja, Fareen; Colombeau, Benjamin; Godet, Ludovic; Martin, Patrick; Brus, Stephan; Altamirano Sanchez, Efrain; Mannaert, Geert; Dekkers, Harold; Hellings, Geert; Horiguchi, Naoto; Vandervorst, Wilfried; Thean, Aaron
Conference
Symposium on VLSI Technology - VLSIT
Title
Heated implantation with amorphous carbon CMOS mask for scaled FinFETs
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections