Authors

Ivanov, Tsvetan; Pourghaderi, Mohammad Ali; Lin, Dennis; Yu, Jen-Kan; Tan, S.; Mikhaylich, K.; Kimura, Y.; Hellin, David; Geypen, Jef; Bender, Hugo; Vertommen, Johan; Kamarthy, G.; Collaert, Nadine; Marks, J.; Vahedi, V; Arghavani, R.; Thean, Aaron

Conference

Extended Abstracts of the International Conference on Solid State Devices and Materials - SSDM

Title

The influence of post-etch InGaAs Fin profile on electrical performance

Publication type

Proceedings paper