On the temperature dependence of frequency dispersion in C-V measurements of III-V MOS devices and its application in spatial profiling of border traps

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Authors
Vais, Abhitosh; Lin, Dennis; Dou, Chunmeng; Yuan, Yu; Martens, Koen; Ivanov, Tsvetan; Collaert, Nadine; De Meyer, Kristin; Thean, Aaron; Taur, Yuan
Conference
44th IEEE Semiconductor Interface Specialists Conference
Title
On the temperature dependence of frequency dispersion in C-V measurements of III-V MOS devices and its application in spatial profiling of border traps
Publication type
Meeting abstract
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