Authors

Vanstreels, Kris; Wu, Chen; Verdonck, Patrick; Schneider, Dieter; Gonzalez, Mario; Martini, Roberto; Baklanov, Mikhaïl

Conference

MRS Spring Meeting - Symposium AA: Advanced Interconnects for Micro- and Nanoelectronics - Materials, Processes, and Reliability

Title

Intrinsic effect of porosity on the stiffness and fracture energy of nano porous ultra low-k dielectrics

Publication type

Meeting abstract