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Intrinsic effect of porosity on the stiffness and fracture energy of nano porous ultra low-k dielectrics

dc.contributor.authorVanstreels, Kris
dc.contributor.authorWu, Chen
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorSchneider, Dieter
dc.contributor.authorGonzalez, Mario
dc.contributor.authorMartini, Roberto
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-21T13:52:37Z
dc.date.available2021-10-21T13:52:37Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23309
dc.sourceIIOimport
dc.titleIntrinsic effect of porosity on the stiffness and fracture energy of nano porous ultra low-k dielectrics
dc.typeMeeting abstract
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorWu, Chen
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorGonzalez, Mario
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecWu, Chen::0000-0002-4636-8842
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecGonzalez, Mario::0000-0003-4374-4854
dc.source.peerreviewno
dc.source.beginpageAA3.05
dc.source.conferenceMRS Spring Meeting - Symposium AA: Advanced Interconnects for Micro- and Nanoelectronics - Materials, Processes, and Reliability
dc.source.conferencedate1/04/2013
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


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