dc.contributor.author | Veloso, Anabela | |
dc.contributor.author | Boccardi, Guillaume | |
dc.contributor.author | Ragnarsson, Lars-Ake | |
dc.contributor.author | Higuchi, Yuichi | |
dc.contributor.author | Lee, Jae Won | |
dc.contributor.author | Simoen, Eddy | |
dc.contributor.author | Roussel, Philippe | |
dc.contributor.author | Cho, Moon Ju | |
dc.contributor.author | Chew, Soon Aik | |
dc.contributor.author | Schram, Tom | |
dc.contributor.author | Dekkers, Harold | |
dc.contributor.author | Van Ammel, Annemie | |
dc.contributor.author | Witters, Thomas | |
dc.contributor.author | Brus, Stephan | |
dc.contributor.author | Dangol, Anish | |
dc.contributor.author | Paraschiv, Vasile | |
dc.contributor.author | Vecchio, Emma | |
dc.contributor.author | Shi, Xiaoping | |
dc.contributor.author | Sebaai, Farid | |
dc.contributor.author | Kellens, Kristof | |
dc.contributor.author | Heylen, Nancy | |
dc.contributor.author | Devriendt, Katia | |
dc.contributor.author | Richard, Olivier | |
dc.contributor.author | Bender, Hugo | |
dc.contributor.author | Chiarella, Thomas | |
dc.contributor.author | Arimura, Hiroaki | |
dc.contributor.author | Thean, Aaron | |
dc.contributor.author | Horiguchi, Naoto | |
dc.date.accessioned | 2021-10-21T13:55:54Z | |
dc.date.available | 2021-10-21T13:55:54Z | |
dc.date.issued | 2013 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/23314 | |
dc.source | IIOimport | |
dc.title | Highly scalable effective work function engineering approach for multi-VT modulation of planar and FinFET-based RMG high-k last devies for (sub-)22nm nodes | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Veloso, Anabela | |
dc.contributor.imecauthor | Boccardi, Guillaume | |
dc.contributor.imecauthor | Ragnarsson, Lars-Ake | |
dc.contributor.imecauthor | Simoen, Eddy | |
dc.contributor.imecauthor | Roussel, Philippe | |
dc.contributor.imecauthor | Schram, Tom | |
dc.contributor.imecauthor | Dekkers, Harold | |
dc.contributor.imecauthor | Van Ammel, Annemie | |
dc.contributor.imecauthor | Witters, Thomas | |
dc.contributor.imecauthor | Brus, Stephan | |
dc.contributor.imecauthor | Dangol, Anish | |
dc.contributor.imecauthor | Paraschiv, Vasile | |
dc.contributor.imecauthor | Vecchio, Emma | |
dc.contributor.imecauthor | Sebaai, Farid | |
dc.contributor.imecauthor | Kellens, Kristof | |
dc.contributor.imecauthor | Heylen, Nancy | |
dc.contributor.imecauthor | Devriendt, Katia | |
dc.contributor.imecauthor | Richard, Olivier | |
dc.contributor.imecauthor | Bender, Hugo | |
dc.contributor.imecauthor | Chiarella, Thomas | |
dc.contributor.imecauthor | Arimura, Hiroaki | |
dc.contributor.imecauthor | Thean, Aaron | |
dc.contributor.imecauthor | Horiguchi, Naoto | |
dc.contributor.orcidimec | Boccardi, Guillaume::0000-0003-3226-4572 | |
dc.contributor.orcidimec | Ragnarsson, Lars-Ake::0000-0003-1057-8140 | |
dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
dc.contributor.orcidimec | Roussel, Philippe::0000-0002-0402-8225 | |
dc.contributor.orcidimec | Schram, Tom::0000-0003-1533-7055 | |
dc.contributor.orcidimec | Dekkers, Harold::0000-0003-4778-5709 | |
dc.contributor.orcidimec | Devriendt, Katia::0000-0002-0662-7926 | |
dc.contributor.orcidimec | Richard, Olivier::0000-0002-3994-8021 | |
dc.contributor.orcidimec | Chiarella, Thomas::0000-0002-6155-9030 | |
dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
dc.source.peerreview | yes | |
dc.source.beginpage | T194 | |
dc.source.endpage | T195 | |
dc.source.conference | Symposium on VLSI Technology | |
dc.source.conferencedate | 11/06/2013 | |
dc.source.conferencelocation | Kyoto Japan | |
dc.identifier.url | http://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6576649&queryText%3DHighly+scalable+Effective+Work+Function+engin | |
imec.availability | Published - imec | |