Publication:
Highly scalable effective work function engineering approach for multi-VT modulation of planar and FinFET-based RMG high-k last devies for (sub-)22nm nodes
Date
Loading...
Journal
Abstract
Description
Metrics
Views
2048 since deposited on 2021-10-21
3last month
1last week
Acq. date: 2026-01-08
Citations
Metrics
Views
2048 since deposited on 2021-10-21
3last month
1last week
Acq. date: 2026-01-08
Citations