Publication:
Highly scalable effective work function engineering approach for multi-VT modulation of planar and FinFET-based RMG high-k last devies for (sub-)22nm nodes
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2045 since deposited on 2021-10-21
2last month
Acq. date: 2025-12-09
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2045 since deposited on 2021-10-21
2last month
Acq. date: 2025-12-09
Citations