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Effective work function engineering for aggressively scaled planar and multi-gate fin field-effect transistor-based devices with high-k last replacement metal gate technology

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1 since deposited on 2021-10-21
Acq. date: 2026-01-11

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1958 since deposited on 2021-10-21
2last month
Acq. date: 2026-01-11

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1 since deposited on 2021-10-21
Acq. date: 2026-01-11

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1958 since deposited on 2021-10-21
2last month
Acq. date: 2026-01-11

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