Authors

Vereecke, Guy; Xu, XiuMei; Tsai, Wei-Kang; Armini, Silvia; Delande, Tinne; Doumen, Geert; Kentie, Frank; Shi, Xiaoping; Holsteyns, Frank; Struyf, Herbert; De Gendt, Stefan

Conference

224th Electrochemical Society Meeting: 13th Int. Symp. on Semiconductor Cleaning Science and Technology

Title

Wetting behavior of aqueous solutions on high aspect ratio nanopillars with hydrophilic surface finish

Publication type

Meeting abstract

Embargo date

9999-12-31