A novel method to measure the internal pressure of MEMS thin-film packages

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Authors

Wang, Bo; De Coster, Jeroen; De Wolf, Ingrid; Wevers, Martine

ISSN

0026-2714

Issue

9_11

Journal

Microelectronics Reliability

Volume

53

Title

A novel method to measure the internal pressure of MEMS thin-film packages

Publication type

Journal article

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