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Integration aspects of strained Ge pFETs

dc.contributor.authorWitters, Liesbeth
dc.contributor.authorEneman, Geert
dc.contributor.authorMitard, Jerome
dc.contributor.authorVincent, Benjamin
dc.contributor.authorLoo, Roger
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorMilenin, Alexey
dc.contributor.authorMertens, Sofie
dc.contributor.authorThean, Aaron
dc.contributor.authorCollaert, Nadine
dc.date.accessioned2021-10-21T14:39:03Z
dc.date.available2021-10-21T14:39:03Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23398
dc.sourceIIOimport
dc.titleIntegration aspects of strained Ge pFETs
dc.typeProceedings paper
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorVincent, Benjamin
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorMilenin, Alexey
dc.contributor.imecauthorMertens, Sofie
dc.contributor.imecauthorThean, Aaron
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecMilenin, Alexey::0000-0003-0747-0462
dc.contributor.orcidimecMertens, Sofie::0000-0002-1482-6730
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage49
dc.source.endpage52
dc.source.conference14th International Conference on Ultimate Integration in Silicon - ULIS
dc.source.conferencedate20/03/2013
dc.source.conferencelocationWarwick UK
dc.identifier.urlhttp://ieeexplore.ieee.org/search/searchresult.jsp?newsearch=true&queryText=witters+ulis&.x=0&.y=0
imec.availabilityPublished - open access


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