Authors

Zanaty, Mohamed; Jansen, Roelof; Rochus, Veronique; Abbas, M.; Witvrouw, Ann; Tilmans, Harrie; Rottenberg, Xavier

Conference

IEEE Int. Conf on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsyst. - EuroSimE

Title

Influence of nonlinear intermolecular forces on the harmonic behavior of NEM resonators

Publication type

Proceedings paper

Embargo date

9999-12-31