dc.contributor.author | Zanaty, Mohamed | |
dc.contributor.author | Jansen, Roelof | |
dc.contributor.author | Rochus, Veronique | |
dc.contributor.author | Abbas, M. | |
dc.contributor.author | Witvrouw, Ann | |
dc.contributor.author | Tilmans, Harrie | |
dc.contributor.author | Rottenberg, Xavier | |
dc.date.accessioned | 2021-10-21T14:56:44Z | |
dc.date.available | 2021-10-21T14:56:44Z | |
dc.date.issued | 2013 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/23430 | |
dc.source | IIOimport | |
dc.title | Influence of nonlinear intermolecular forces on the harmonic behavior of NEM resonators | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Jansen, Roelof | |
dc.contributor.imecauthor | Rochus, Veronique | |
dc.contributor.imecauthor | Tilmans, Harrie | |
dc.contributor.imecauthor | Rottenberg, Xavier | |
dc.contributor.orcidimec | Jansen, Roelof::0000-0001-6685-4699 | |
dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.conference | IEEE Int. Conf on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsyst. - EuroSimE | |
dc.source.conferencedate | 15/04/2013 | |
dc.source.conferencelocation | Wroclaw Poland | |
imec.availability | Published - open access | |