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Atomic layer deposition of Gd2O3 and Sc2O3 on In0.53Ga0.47As: Interfacial layer engineering

dc.contributor.authorAmeen, Mahmoud
dc.contributor.authorNyns, Laura
dc.contributor.authorLin, Dennis
dc.contributor.authorIvanov, Tsvetan
dc.contributor.authorConard, Thierry
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorSioncke, Sonja
dc.contributor.authorFeteha, Mohamed
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorDelabie, Annelies
dc.date.accessioned2021-10-22T00:43:27Z
dc.date.available2021-10-22T00:43:27Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23486
dc.sourceIIOimport
dc.titleAtomic layer deposition of Gd2O3 and Sc2O3 on In0.53Ga0.47As: Interfacial layer engineering
dc.typeMeeting abstract
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorIvanov, Tsvetan
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimecIvanov, Tsvetan::0000-0003-3407-2742
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.source.peerreviewno
dc.source.conference12th International Baltic Conference on Atomic Layer Deposition
dc.source.conferencedate12/05/2014
dc.source.conferencelocationHelsinki Finland
imec.availabilityPublished - imec


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