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Experimental study of programming saturation in low-coupling planar high-k/metal gate Nand flash memory cells using a dedicated test structure
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Authors
Blomme, Pieter
;
Tan, Chi Lim
;
Souriau, Laurent
;
Versluijs, Janko
;
Van den Bosch, Geert
;
Van Houdt, Jan
Conference
IEEE 6th International Memory Workshop - IMW
Title
Experimental study of programming saturation in low-coupling planar high-k/metal gate Nand flash memory cells using a dedicated test structure
Publication type
Proceedings paper
Embargo date
9999-12-31
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