Authors

Breuil, Laurent; Blomme, Pieter; Tan, Chi Lim; Lisoni, Judit; Souriau, Laurent; Zahid, Mohammed; Richard, Olivier; Bender, Hugo; Van den Bosch, Geert; Van Houdt, Jan

Conference

6th International Memory Workshop

Title

Integration of a multi-layer inter-gate dielectric with hybrid floating gate towards 10nm planar NAND flash

Publication type

Proceedings paper