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Comparison between experimental and simulated strain profiles in Ge channels with embedded source/drain stressors
Publication:
Comparison between experimental and simulated strain profiles in Ge channels with embedded source/drain stressors
Date
2014
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Buhler, Rudolf
;
Eneman, Geert
;
Favia, Paola
;
Bender, Hugo
;
Vincent, Benjamin
;
Hikavyy, Andriy
;
Loo, Roger
;
Martino, Joao
;
Claeys, Cor
;
Simoen, Eddy
;
Collaert, Nadine
;
Thean, Aaron
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1878
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Acq. date: 2025-10-29
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Metrics
Views
1878
since deposited on 2021-10-22
2
last week
Acq. date: 2025-10-29
Citations