Authors

Buhler, Rudolf; Eneman, Geert; Favia, Paola; Bender, Hugo; Vincent, Benjamin; Hikavyy, Andriy; Loo, Roger; Martino, Joao; Claeys, Cor; Simoen, Eddy; Collaert, Nadine; Thean, Aaron

Conference

E-MRS Spring Meeting Symposium X: Materials Research for Group IV Semiconductors

Title

Comparison between experimental and simulated strain profiles in Ge channels with embedded source/drain stressors

Publication type

Meeting abstract