SiGe channel formation for 3D vertical channel transistor applications

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Authors
Capogreco, Elena; Lisoni, Judit; Hikavyy, Andriy; Arreghini, Antonio; Vecchio, Emma; Numata, Toshinori; Tan, Chi Lim; De Meyer, Kristin; Van den Bosch, Geert; Van Houdt, Jan
Conference
E-MRS Fall Meeting J: Alternative Integration in Si Microelectronics
Title
SiGe channel formation for 3D vertical channel transistor applications
Publication type
Meeting abstract
Embargo date
9999-12-31
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