Si/O superlattice growth: structural insights and epitaxial process optimization

Thumbnail
Metadata
Show full item record
Authors
Caymax, Matty; Jayachandran, Suseendran; Delabie, Annelies; Heyns, Marc
Conference
7th International Workshop on New Group IV semiconductor Nanolelectronics
Title
Si/O superlattice growth: structural insights and epitaxial process optimization
Publication type
Proceedings paper
Collections