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Si/O superlattice growth: structural insights and epitaxial process optimization

dc.contributor.authorCaymax, Matty
dc.contributor.authorJayachandran, Suseendran
dc.contributor.authorDelabie, Annelies
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-22T00:52:58Z
dc.date.available2021-10-22T00:52:58Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23613
dc.sourceIIOimport
dc.titleSi/O superlattice growth: structural insights and epitaxial process optimization
dc.typeProceedings paper
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorJayachandran, Suseendran
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorHeyns, Marc
dc.source.peerreviewno
dc.source.conference7th International Workshop on New Group IV semiconductor Nanolelectronics
dc.source.conferencedate27/01/2014
dc.source.conferencelocationSendai Japan
imec.availabilityPublished - imec


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