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Polymer coated MEMS resonator for room temperature NH3 sensing

dc.contributor.authorDam, Van Anh
dc.contributor.authorWouters, Daan
dc.contributor.authorKnoben, Wout
dc.contributor.authorBrongersma, Sywert
dc.contributor.authorvan Schaijk, Rob
dc.date.accessioned2021-10-22T01:04:27Z
dc.date.available2021-10-22T01:04:27Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23694
dc.sourceIIOimport
dc.titlePolymer coated MEMS resonator for room temperature NH3 sensing
dc.typeProceedings paper
dc.contributor.imecauthorDam, Van Anh
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage4
dc.source.conferenceIEEE Sensors Conference - SENSORS
dc.source.conferencedate2/11/2014
dc.source.conferencelocationValencia Spain
dc.identifier.urlhttps://ieeexplore.ieee.org/document/6984966
imec.availabilityPublished - open access


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