Publication:
Active area oxidation during the densification of shallow trench isolation for sub-0.25 micron CMOS
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2007 since deposited on 2021-09-30
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Acq. date: 2026-05-18
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Statistics
Views
2007 since deposited on 2021-09-30
2last month
Acq. date: 2026-05-18
Citations