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Deposition of a silicon oxide film showing enhanced surface passivation through negative fixed charges

dc.contributor.authorDescamps, Pierre
dc.contributor.authorKaiser, Vincent
dc.contributor.authorBeaucarne, Guy
dc.contributor.authorKuzma Filipek, Izabela
dc.contributor.authorDelamare,
dc.date.accessioned2021-10-22T01:15:17Z
dc.date.available2021-10-22T01:15:17Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23755
dc.sourceIIOimport
dc.titleDeposition of a silicon oxide film showing enhanced surface passivation through negative fixed charges
dc.typeOral presentation
dc.contributor.imecauthorKuzma Filipek, Izabela
dc.source.peerreviewno
dc.source.conference4th International Conference on Silicon Photovoltaics - Silicon PV
dc.source.conferencedate25/03/2014
dc.source.conferencelocation�s-Hertogenbosch The Netherlands
imec.availabilityPublished - imec


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