Authors

Dubey, Vikas; Van Huylenbroeck, Stefaan; Tutunjyan, Nina; Slabbekoorn, John; De Wolf, Ingrid; Rebibis, Kenneth June; Miller, Andy; Celis, Jean-Pierre; Croes, Kristof; Beyne, Eric

Conference

16th IEEE Electronic Packaging Technology Conference - EPTC

Title

Room temperature and zero pressure high quality oxide direct bonding for 3D self-aligned assembly

Publication type

Proceedings paper

Embargo date

9999-12-31