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Direct observation of both contact and remote oxygen scavenging of GeO2 in a metal-oxide-semiconductor stack
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Authors
Fadida, Sivan
;
Shekhter, P.
;
Cvetko, D.
;
Floreano, L.
;
Verdini, A
;
Nyns, Laura
;
Van Elshocht, Sven
;
Kymissis, I.
;
Eizenberg, Moshe
ISSN
0021-8979
Issue
16
Journal
Journal of Applied Physics
Volume
116
Title
Direct observation of both contact and remote oxygen scavenging of GeO2 in a metal-oxide-semiconductor stack
Publication type
Journal article
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