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Distinction between silicon and oxide traps using single-trap spectroscopy
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Authors
Fang, Wen
;
Simoen, Eddy
;
Aoulaiche, Marc
;
Luo, Jun
;
Zhao, Chao
;
Claeys, Cor
Conference
E-MRS Spring Meeting Symposium H: Analytical Techniques for Precise Characterization of Nanomaterials - ALTECH
Title
Distinction between silicon and oxide traps using single-trap spectroscopy
Publication type
Meeting abstract
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