Publication:
Investigation of 3D strain in FinFETs by nano beam diffraction parallel and perpendicular to the trenches
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1813 since deposited on 2021-10-22
2last month
Acq. date: 2026-08-28
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Statistics
Views
1813 since deposited on 2021-10-22
2last month
Acq. date: 2026-08-28
Citations