Publication:

Investigation of 3D strain in FinFETs by nano beam diffraction parallel and perpendicular to the trenches

Date

2014

Proceedings Paper

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Author(s)

;

Witters, Liesbeth

;

;

Collaert, Nadine

;

Statistics

1810 since deposited on 2021-10-22

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Acq. date: 2026-02-28