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Investigation of 3D strain in FinFETs by nano beam diffraction parallel and perpendicular to the trenches
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Authors
Favia, Paola
;
Witters, Liesbeth
;
Mitard, Jerome
;
Collaert, Nadine
;
Bender, Hugo
Conference
18th International Microscopy Congress
Title
Investigation of 3D strain in FinFETs by nano beam diffraction parallel and perpendicular to the trenches
Publication type
Proceedings paper
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