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Investigation of 3D strain in FinFETs by nano beam diffraction parallel and perpendicular to the trenches

dc.contributor.authorFavia, Paola
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorMitard, Jerome
dc.contributor.authorCollaert, Nadine
dc.contributor.authorBender, Hugo
dc.date.accessioned2021-10-22T01:26:52Z
dc.date.available2021-10-22T01:26:52Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23810
dc.sourceIIOimport
dc.titleInvestigation of 3D strain in FinFETs by nano beam diffraction parallel and perpendicular to the trenches
dc.typeProceedings paper
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorBender, Hugo
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.source.peerreviewyes
dc.source.conference18th International Microscopy Congress
dc.source.conferencedate7/09/2014
dc.source.conferencelocationPraag Czech Republic
imec.availabilityPublished - imec


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