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NEXAFS characterization of inorganic and organic materials for semiconductor application

dc.contributor.authorFleischmann, Claudia
dc.contributor.authorHoenicke, Philipp
dc.contributor.authorHermann, Peter
dc.contributor.authorMueller, Matthias
dc.contributor.authorBeckhoff, Burkhard
dc.contributor.authorVoroshazi, Eszter
dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-22T01:29:33Z
dc.date.available2021-10-22T01:29:33Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23822
dc.sourceIIOimport
dc.titleNEXAFS characterization of inorganic and organic materials for semiconductor application
dc.typeMeeting abstract
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorVoroshazi, Eszter
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.beginpagena
dc.source.conferenceEuropean Conference on X-Ray Spectrometry - EXRS
dc.source.conferencedate15/06/2014
dc.source.conferencelocationBologna Italy
imec.availabilityPublished - imec


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