Poly-Si heaters for ultra-fast local temperature control of on-wafer test structures

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Authors
Franco, Jacopo; Kaczer, Ben; Groeseneken, Guido
ISSN
0167-9317
Journal
Microelectronic Engineering
Volume
114
Title
Poly-Si heaters for ultra-fast local temperature control of on-wafer test structures
Publication type
Journal article
Embargo date
9999-12-31
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