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Quantification of group IV alloys in confined structures: the self focusing SIMS approach

dc.contributor.authorFranquet, Alexis
dc.contributor.authorDouhard, Bastien
dc.contributor.authorMelkonyan, Davit
dc.contributor.authorDelmotte, Joris
dc.contributor.authorDemeulemeester, Jelle
dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-22T01:32:36Z
dc.date.available2021-10-22T01:32:36Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23834
dc.sourceIIOimport
dc.titleQuantification of group IV alloys in confined structures: the self focusing SIMS approach
dc.typeMeeting abstract
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.beginpagena
dc.source.conferenceSIMS Europe
dc.source.conferencedate7/09/2014
dc.source.conferencelocationMünster Germany
imec.availabilityPublished - imec


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