Quantification of group IV alloys in confined structures: the self focusing SIMS approach

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Authors
Franquet, Alexis; Douhard, Bastien; Melkonyan, Davit; Delmotte, Joris; Demeulemeester, Jelle; Conard, Thierry; Vandervorst, Wilfried
Conference
SIMS Europe
Title
Quantification of group IV alloys in confined structures: the self focusing SIMS approach
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Meeting abstract
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