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Publication:

Quantification of group IV alloys in confined structures: the self focusing SIMS approach

Date

2014

Meeting abstract

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Author(s)

Franquet, Alexis

;

Douhard, Bastien

;

Melkonyan, Davit

;

Delmotte, Joris

;

Demeulemeester, Jelle

;

Conard, Thierry

;

Vandervorst, Wilfried

Statistics

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Acq. date: 2026-07-28