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Quantification of group IV alloys in confined structures: the self focusing SIMS approach

Date

2014
Meeting abstract
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dc.contributor.authorFranquet, Alexis
dc.contributor.authorDouhard, Bastien
dc.contributor.authorMelkonyan, Davit
dc.contributor.authorDelmotte, Joris
dc.contributor.authorDemeulemeester, Jelle
dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.accessioned2021-10-22T01:32:36Z
dc.date.available2021-10-22T01:32:36Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23834
dc.source.beginpagena
dc.source.conferenceSIMS Europe
dc.source.conferencedate7/09/2014
dc.source.conferencelocationMünster Germany
dc.title

Quantification of group IV alloys in confined structures: the self focusing SIMS approach

dc.typeMeeting abstract
dspace.entity.typePublication
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