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Investigation of nanoscopic controlled material removal by doped diamond tips for semiconductor device analysis

dc.contributor.authorGomes, Oliver
dc.contributor.authorHantschel, Thomas
dc.contributor.authorPierre, E.
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-22T01:40:02Z
dc.date.available2021-10-22T01:40:02Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23864
dc.sourceIIOimport
dc.titleInvestigation of nanoscopic controlled material removal by doped diamond tips for semiconductor device analysis
dc.typeOral presentation
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewno
dc.source.conferenceEuropean Symposium on Friction, Wear and Wear Resistance
dc.source.conferencedate6/05/2014
dc.source.conferencelocationKarlsruhe Germany
dc.identifier.urlhttp://www.dgm.de/dgm/friction_wear/images/finalprogramme.pdf
imec.availabilityPublished - imec


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