dc.contributor.author | Gonzalez, Mario | |
dc.contributor.author | Vanstreels, Kris | |
dc.contributor.author | Cherman, Vladimir | |
dc.contributor.author | Croes, Kristof | |
dc.contributor.author | Kljucar, Luka | |
dc.contributor.author | De Wolf, Ingrid | |
dc.contributor.author | Tokei, Zsolt | |
dc.date.accessioned | 2021-10-22T01:40:48Z | |
dc.date.available | 2021-10-22T01:40:48Z | |
dc.date.issued | 2014 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/23867 | |
dc.source | IIOimport | |
dc.title | Mechanical stability of Cu/low-k BEOL interconnects | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Gonzalez, Mario | |
dc.contributor.imecauthor | Vanstreels, Kris | |
dc.contributor.imecauthor | Cherman, Vladimir | |
dc.contributor.imecauthor | Croes, Kristof | |
dc.contributor.imecauthor | Kljucar, Luka | |
dc.contributor.imecauthor | De Wolf, Ingrid | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.orcidimec | Vanstreels, Kris::0000-0002-4420-0966 | |
dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 2F.2.1 | |
dc.source.endpage | 2F.2.6 | |
dc.source.conference | International Reliability Physics Symposium - IRPS | |
dc.source.conferencedate | 3/06/2014 | |
dc.source.conferencelocation | Waikoloa, HI USA | |
dc.identifier.url | http://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6860606&contentType=Conference+Publications | |
imec.availability | Published - open access | |