Publication:

Mechanical stability of Cu/low-k BEOL interconnects

Date

2014

Proceedings Paper

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Files

28651.pdf 2.04 MB

Author(s)

Gonzalez, Mario

;

Vanstreels, Kris

;

Cherman, Vladimir

;

;

;

De Wolf, Ingrid

;

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Acq. date: 2026-10-12