Publication:

Mechanical stability of Cu/low-k BEOL interconnects

Date

2014
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorGonzalez, Mario
dc.contributor.authorVanstreels, Kris
dc.contributor.authorCherman, Vladimir
dc.contributor.authorCroes, Kristof
dc.contributor.authorKljucar, Luka
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorGonzalez, Mario
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorKljucar, Luka
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-22T01:40:48Z
dc.date.available2021-10-22T01:40:48Z
dc.date.embargo9999-12-31
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23867
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6860606&contentType=Conference+Publications
dc.source.beginpage2F.2.1
dc.source.conferenceInternational Reliability Physics Symposium - IRPS
dc.source.conferencedate3/06/2014
dc.source.conferencelocationWaikoloa, HI USA
dc.source.endpage2F.2.6
dc.title

Mechanical stability of Cu/low-k BEOL interconnects

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
28651.pdf
Size:
2.04 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions