Publication:

Mechanical stability of Cu/low-k BEOL interconnects

Date

2014

Proceedings Paper

Simple item page Full metadata Statistics

Files

28651.pdf 2.04 MB

Author(s)

Gonzalez, Mario

;

Vanstreels, Kris

;

Cherman, Vladimir

;

;

;

De Wolf, Ingrid

;

Metrics

1849 since deposited on 2021-10-22

2last month

Acq. date: 2025-12-16