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Role of the Ta scavenger electrode in the excellent switching control and reliability of a scalable low-current operated TiN\Ta2O5\Ta RRAM device
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Authors
Goux, Ludovic
;
Fantini, Andrea
;
Redolfi, Augusto
;
Chen, Michael
;
Shi, FangFang
;
Degraeve, Robin
;
Chen, Yangyin
;
Witters, Thomas
;
Groeseneken, Guido
;
Jurczak, Gosia
Conference
Symposium on VLSI technology
Title
Role of the Ta scavenger electrode in the excellent switching control and reliability of a scalable low-current operated TiN\Ta2O5\Ta RRAM device
Publication type
Proceedings paper
Embargo date
9999-12-31
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