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BTI reliability of advanced gate stacks for beyond silicon devices: challenges and opportunities
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Authors
Groeseneken, Guido
;
Franco, Jacopo
;
Cho, Moon Ju
;
Kaczer, Ben
;
Toledano Luque, Maria
;
Roussel, Philippe
;
Kauerauf, Thomas
;
Alian, AliReza
;
Mitard, Jerome
;
Arimura, Hiroaki
;
Lin, Dennis
;
Waldron, Niamh
;
Sioncke, Sonja
;
Witters, Liesbeth
;
Mertens, Hans
;
Ragnarsson, Lars-Ake
;
Heyns, Marc
;
Collaert, Nadine
;
Thean, Aaron
;
Steegen, An
Conference
International Electron Device Meeting - IEDM
Title
BTI reliability of advanced gate stacks for beyond silicon devices: challenges and opportunities
Publication type
Proceedings paper
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