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Process optimization of templated DSA flows

dc.contributor.authorGronheid, Roel
dc.contributor.authorBekaert, Joost
dc.contributor.authorMKuppuswamy, Vijaya Kumar
dc.contributor.authorVandenbroeck, Nadia
dc.contributor.authorDoise, Jan
dc.contributor.authorCao, Yi
dc.contributor.authorLin, Guanyang
dc.contributor.authorSayan, Safak
dc.contributor.authorParnell, Doni
dc.contributor.authorSomervell, Mark
dc.date.accessioned2021-10-22T01:45:21Z
dc.date.available2021-10-22T01:45:21Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23884
dc.sourceIIOimport
dc.titleProcess optimization of templated DSA flows
dc.typeProceedings paper
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorVandenbroeck, Nadia
dc.contributor.imecauthorDoise, Jan
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.source.peerreviewyes
dc.source.beginpage90510I
dc.source.conferenceAdvances in Patterning Materials and Processes XXXI
dc.source.conferencedate24/02/2014
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1854367
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 9051


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