Publication:

Readying directed self-assembly for patterning in semiconductor manufacturing

Date

2014
Meeting abstract
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Author(s)

Gronheid, Roel  
;
Chan, BT  
;
Pathangi Sriraman, Hari
;
Van Den Heuvel, Dieter  
;
MKuppuswamy, Vijaya Kumar
;
Doise, Jan  
;
Bekaert, Joost  
;
Rincon Delgadillo, Paulina  
;
Nealey, Paul
;
Cao, Yi
;
Her, YoungJun  
;
Sayan, Safak
;
Parnell, Doni
;
Romo Negreira, Ainhoa  
;
Somervell, Mark

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Abstract

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2005 since deposited on 2021-10-22
Acq. date: 2026-05-19

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2005 since deposited on 2021-10-22
Acq. date: 2026-05-19

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