Authors

Gronheid, Roel; Chan, BT; Pathangi Sriraman, Hari; Van Den Heuvel, Dieter; MKuppuswamy, Vijaya Kumar; Doise, Jan; Bekaert, Joost; Rincon Delgadillo, Paulina; Nealey, Paul; Cao, Yi; Her, YoungJun; Sayan, Safak; Parnell, Doni; Romo Negreira, Ainhoa; Somervell, Mark

Conference

58th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication - EIPBN

Title

Readying directed self-assembly for patterning in semiconductor manufacturing

Publication type

Meeting abstract