Metrology and inspection requirements for successful stacking of integrated circuits

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Authors

Halder, Sandip; Miller, Andy; Van Puymbroeck, Jan; Nieuborg, Nancy; Beyne, Eric

ISSN

0894-6507

Issue

3

Journal

IEEE Transactions on Semiconductor Manufacturing

Volume

27

Title

Metrology and inspection requirements for successful stacking of integrated circuits

Publication type

Journal article

Embargo date

9999-12-31

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Articles