Authors

Han, Jeong Hwan; Nyns, Laura; Delabie, Annelies; Franquet, Alexis; Van Elshocht, Sven; Adelmann, Christoph

ISSN

0897-4756

Issue

3

Journal

Chemistry of Materials

Volume

26

Title

Reaction Chemistry during the Atomic Layer Deposition of Sc2O3 and Gd2O3 from Sc(MeCp)3, Gd(iPrCp)3, and H2O

Publication type

Journal article