High Ge content SiGe thin films: growth, properties and integration

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Authors
Hikavyy, Andriy; Rosseel, Erik; Dhayalan, Sathish Kumar; Witters, Liesbeth; Mertens, Hans; Bender, Hugo; Favia, Paola; Loo, Roger
Conference
SiGe, Ge, and Related Copounds 6: Materials, Processing, and Devices
Title
High Ge content SiGe thin films: growth, properties and integration
Publication type
Proceedings paper
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